周波数変調方式磁気力顕微鏡の開発

抄録

A magnetic force microscope (MFM) utilizing frequency modulation (FM) technology was developed, with the aim of improving the performance of conventional MFMs. The FM technology made it possible to operate the MFM in a vacuum, whereas this is impossible with an MFM made by using the conbentional method. The output noise was reduced by 10 dB when it was operated in a vacuum, because of the increased cantilever Q value due to the reduction of the air damping. The instrument is combined with a scanning electron microscope, which is efficient in directing the probe to a specific region on the sample because of its deep focusing length. The MFM images of the recorded domains on the magnetooptical disks and the magnetic tapes are presented. From those images, the resolution of the instrument is estimated as 50 to 100 nm.