抄録
Co-Cr films deposited at room temperature with an extremely high Ar gas pressure were analyzed with SEM and Auger electron spectroscopy in order to understand magnetic isolation. An SEM observation showed distinctive columnar grain structures in the film that could lead magnetic isolation between the grains. Auger analysis revealed that these films included oxygen not only at the very top surface but also inside the films. The amount of oxygen in the film with a high perpendicular coercivity is much larger than that with a low coercivity especially at the initial stage of growing. The oxidation might occur during and/or after the deposition by penetrating through the air gap-like boundaries of the columnar grains. Such a microstructure of the Co-Cr films seems one of the excellent features for a candidate medium for high density recording.
