磁歪薄膜を用いた微小走行機構の動作特性

抄録

This paper presents a new type of wireless walking micro-mechanism based on magnetostrictive vibration. A 16-mm-long trial walking mechanism, composed of a magnetostrictive thin-film bimorph and two inclined legs, was fabricated. It showed a high velocity of the order of cm/s and a reversible motion, with forward and backward directions. The actuation of the legs was analyzed by using a simple model. The calculated velocity agreed with the experimental results.