1996 年 20 巻 S_1_MORIS_96 号 p. S1_357-360
The depaendence of surface motphology of thin film garnets deposited by metallo-organic decomposition (MOD) on process conditions was investigated in an effort to produce MOD garnets with small roughness. The surface morphology of sputtered films were also studied for comparison. The surface morphologies were studied by atomic force microscopy (AFM) and cross-sectional electron microscopy. It was found that the surface morphology of the MOD films was very sensitive to film deposition conditions such as the number of layers, spincoating speed, heat treatment conditions, and the condition of the organic solution. It was also found that the MOD garnets were inherently rough due to a significant volume change which occurs during the drying and decomposition process. The smoothest MOD film showed mean roughness of order of 5 nm at 150 nm thickness while the roughness of the sputtered film was order of 0.5 nm.
