Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Magnetic Recording Media
Effect of Pre-treatment of Si Substrate in CoCrTa/Cr Magnetic Films
T. Osaka, T. Homma, Y. Kurokawa, T. Taguchi, A. Takizawa
Author information
Keywords: Si(100) substrate, HF pre-treatment, magneticproperties of CoCrTa/Cr, changein microstructure
JOURNAL OPEN ACCESS

1997 Volume 21 Issue 4_2 Pages 213-216

Details
Download PDF (316K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
CoCrTa/Cr magnetic films on Si(100) substrates with and without HF pre-treatment were prepared by dc magnetron sputtering. It was found that the coercivity was increased by HF pre-treatment of the Si substrate for Cr underlayers of various thicknesses. The microstructure analyses of the magnetic films using XRD. FE-SEM,and TEM showedthat the crystallinity and the orientation of the c-axis in the film plane were enhanced and that the grain size was increased by HF pre-treatment.
Content from these authors
© 1997 by The Magnetics Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Successor

Journal of the Magnetics Society of Japan

Share this page
feedback
 Top