Abstract
A detailed study on the effect of composition and other process parameters on the magnetic properties of NdFeB thin films is presented. It was found that a neodymium concentration of 13-16 at% and a substrate temperature of 560°C were suitable for forming the Nd2Fe14B phase. An investigation into the effect of the substrate revealed that substrates that have oxygen content may not be suitable for preparing these thin films. The coercive force of these films was also found to depend on the thickness.
