Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Soft Magnetic Materials
Soft Magnetic Fe-Si/Cr Epitaxial Multilayers
S. Yaegashi, T. Kurihara, K. Satoh
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Keywords: Fe-7.2% Si (111) film, epitaxial film, multilayer film, magnetic anisotropy, sputtering, Si (111) substrate, soft magnetism
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1997 Volume 21 Issue 4_2 Pages 581-584

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Abstract
Epitaxial Fe-7.2 wt%Si (111) monolayer films and Fe-Si (111)/Cr (111) multilayer films were prepared on Si (111) substrates by facing-targets sputtering. Excellent soft magnetic properties were obtained in monolayer films with a thickness of less than 200 nm, and Fe-Si (111)/Cr (111) multilayer films with a Cr layer thickness of 20 nm. Torque measurements of the monolayer and multilayer films showed that an anomalous increase in the effective anisotropy energy caused a deterioration in the soft magnetic characteristics.
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© 1997 by The Magnetics Society of Japan
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