抄録
Epitaxial Fe-7.2 wt%Si (111) monolayer films and Fe-Si (111)/Cr (111) multilayer films were prepared on Si (111) substrates by facing-targets sputtering. Excellent soft magnetic properties were obtained in monolayer films with a thickness of less than 200 nm, and Fe-Si (111)/Cr (111) multilayer films with a Cr layer thickness of 20 nm. Torque measurements of the monolayer and multilayer films showed that an anomalous increase in the effective anisotropy energy caused a deterioration in the soft magnetic characteristics.
