Abstract
This paper describes a theoretical analysis of the mechanical properties of magnetic thin-film cantilevers for micro-electromechanical systems. Magnetostriction and magnetic torque were used as driving principles in this study. The magnetostriction-driven cantilever had a bimorph structure, composed of TbFe and SmFe thin films, and the torque-driven one had a metal powder (MP) thin film or a rare-earth magnet thin film. The static deflection and force produced by both cantilevers were calculated by the theory of elasticity. As a result, it was found that the conditions suitable for each driving principle depended on the ratio of thickness to length and the intensity of the applied magnetic field.
