抄録
Copper is generally used as a conductor in an air-core spiral thin film inductor. But the inductance of the air-core spiral inductor is very low. In order to improve the inductance, permalloy is used as a conductor in this simulation study. The inductance are 953 nH and 184 nH at 10 MHz with permalloy conductor and copper conductor, respectively. The resistance of the inductor with permalloy conductor is larger than that of the inductor with copper conductor about ten times and the quality factors are 1.4 and 2.5 at 10 MHz in the permalloy and copper coil inductor, respectively. Consequently, we propose the possibility of inductor using the permalloy as the conductor in 10 MHz range.
