走査型磁気抵抗効果顕微鏡用カンチレバーの作製と評価

抄録

A variety of techniques have been provided to obtain quantitative measurement of the surface magnetic properties of materials with high spatial resolution Scanning magnetoresistance microscopy (SMRM) is a scanning probe technique in which a magnetoresistive (MR) sensor is used as a magnetic probe. It allows direct imaging of the magnetic flux in the sample. In previous work on SMRM, no feed-back system has been used to control the sample-sensor distance. Therefore, it was impossible to obtain topographic information on the sample. We made a cantilever with a MR sensor by means of photolithography, electron beam lithography, and micromachining. By using the feedback system of atomic force microscope, simultaneous measurement of the magnetic field and surface topography was realized.