Deposition of Co-Cr-Ta/Pt/Ti Perpendicular Magnetic Thin Films and Introduction of a Pt Interlayer

Abstract

Pt/Ti layers were investigated for the under layers of Co-Cr-Ta perpendicular magnetic recording media. The Co-Cr-Ta/Pt/Ti trilayered films exhibited better c-axis orientation and higher perpendicular coercivity than the Co-Cr-Ta/Pt bilayered films. In order to decrease grain size of the Co-Cr-Ta recording layer, a 5-nm-thick Pt interlayer was introduced to compose [Co-Cr-Ta/Pt]_n multilayers. We found that the Pt interlayer was effective for decreasing the grain size of the Co-Cr-Ta recording layer without degrading its perpendicular coercivity. The Pt/Ti under layer and Pt interlayer are useful for the development of Co-Cr-Ta perpendicular magnetic recording media.