マイクロ EMC 対策用 Ni-Fe 微粒子軟磁性膜の作製

抄録

We demonstrate that Ni-Fe-fine-particle films have potential for use as high-frequency conduction noise suppressors in the quasi-microwave band. Ni-Fe- Sm₂O₃, MgF₂, and B₂O₃ films with different volume fractions of Ni₈₀Fe₂₀ were produced. Samples with soft magnetic properties and electrical resistivity (ρ) higher than 10⁴ (μΩcm) were obtained. Their resistivity is hundreds of times higher than that of Fe-Al-O granular films, and the magnetic resonance loss is several tens of times higher than that of commercially used noise suppressors in the quasi-microwave band. These results suggest that thin-film current noise suppressors that can be integrated into micron-scale electric-devices could be produced by using these films.