Abstract
We studied FePt-fluorocarbon granular thin films for high-density magnetic recording media. The fluorocarbon as matrix in granular film receives significant attention because of the high hardness and low surface roughness and, thus, the potential application in recording media. FePt-fluorocarbon granular were have fabricated by the facing-targets sputtering method with plasma polymerizing reaction. An FePt alloy was deposited on substrate and the fluorocarbon matrix was polymerized at the same time. It was confirmed by TEM observation that a granular structure formed in films fabricated at C4F8 partial pressures of 0.10 and 0.20 mTorr. These films, which consisted of fine FePt particles with a size of 5-10 nm, had high coercivities of 4-8 kOe. It was considered that the FePt-fluorocarbon granular films have the potential to be used in high-density recording media.
