抄録
Cu substitution raises the degree of (001) crystal orientation perpendicular to the film surface for FeCuPt prepared by Rapid Thermal Annealing (RTA). To increase areal packing density of FeCuPt grains, a SiO2 Substrate having self-organized nano-pores was used as a nano-template. The highly ordered structure of the mesophase thin film is formed by the ordering of self-assembled triblock copolymer micelles, and after annealing at about 600 °C, 8 nm nano-pore arrays formed where there had been micells. Ar-etched SiO2 substrate with self organized nano-pores is effective in increasing the areal packing density and decreasing the size of FeCuPt grains prepared by RTA. An average grain diameter, standard deviation of diameter and areal packing density of FeCuPt grains were 5.9 nm, 1.3 nm and 0.57 (about 3 times the non Cu substituted case), respectively. We observed (001) peak and almost no peak at (111) by x-ray diffraction, where the degree of (001) crystal orientation I(001) / I(111) > 3 means a high rate of ordering orientation, which gives us reliable evidence of ordered FeCuPt grains.
