Abstract

This paper reports on neural recording chips with multi-recording microprobes for use in the study of nervous system. Penetrating microprobes array has been fabricated at predetermined sites on a Si substrate by selective vapor-liquid-solid (VLS) Si growth. Diameter, position and length of the Si probes were controlled. Typical Si microprobe dimensions in this work include a length of 60µm and a diameter of 2µm with dimensions and distribution similar to the neurons in a tissue, low neural invasiveness and low tissue damages. In addition, the Si microprobes were fabricated on an integrated circuit (IC). In neuroscience, the Si microprobe electrode array chip will be an effective technique for providing accurate information from neurons in tissue.