抄録
This review focuses on recent fruitful findings of dependence of sputtering phenomena on solid-state property and secondary particle species in the field of interaction of MeV-energy heavy ions with matter. Emission mechanism of singly charged ions from non-insulating targets is explained by the Sigmund-Thompson linear cascade model combined with increase of ionization probability by transient electronic excitation. However, emission mechanism of multiply charged ions differs from that of singly charged ions, and can be explained by a combined mechanism of simultaneous recoiling and ionization by the projectile and the Coulomb repulsion by a short-lived ionized track region. Large cluster ions are produced from non-metallic targets. Mostly clusters are emitted directly from solid surface. However, in the case of Al2O3, they are produced by coagulation of small molecules in a selvage region near the surface.
