Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2189-0803
ISSN-L : 2189-0803
70.2
Session ID : 17aAB-4
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17aAB-4 Growth process of 3C-SiC films and stacking faults on Si(001) studied by TEM
J. Yamasaki, A. Ishida, K. Akiyama, Y. Hirabayashi
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