Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-1112
51.4
Session ID : 31p-YL-8
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31P-YL-8 Characteristics of RF Discharge in Electro-Negative Gas Mixed with Ar Gas : II 1 MHz Discharge in SF_6/Ar Mixture
I. ISHIKAWA, K. AOYAGI, H. KUSUNOKI, Y. SAITO, S. SUGANOMATA
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© 1996 The Physical Society of Japan
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