Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-1171
1993.4
Session ID : 14a-DG-8
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14a-DG-8 Planar Discharges at 1MHz in Electronegative Gases : CF_4, SF_6 / N_2 and SF_6
H. Kobayashi, H. Kusunoki, I. Ishikawa, K. Nagaseki, Y. Saito, S. Suganomata
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© 1993 The Physical Society of Japan
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