14a-DG-11 Discharge Structure of RF Magnetron Sheet Plasma

Meeting Abstracts of the Physical Society of Japan

Online ISSN : 2433-1171

1993.4

Session ID : 14a-DG-11

DOI https://doi.org/10.11316/jpsgaiyoj.1993.4.0_155_1

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14a-DG-11 Discharge Structure of RF Magnetron Sheet Plasma

Hiroharu FUJITA, Kenji MURATA, Yoshihiro OKUNO

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© 1993 The Physical Society of Japan

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