Meeting Abstracts of the Physical Society of Japan
Online ISSN : 2433-118X
1989.4
Session ID : 5a-K-11
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5a-K-11 Plasma Cathode Ion Source for Ion Assistited Deposition
T. Shibuya, T. Honda, Y. Harano, S. Hashimoto, E. Yabe, K. Takayama
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CONFERENCE PROCEEDINGS FREE ACCESS

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© 1989 The Physical Society of Japan
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