抄録
The effects of anisotropy in scatterings in both elastic and inelastic collisions on the electron transport properties in CF4 gas have been examined using the extended FTI (flight time integral) method over a wide E/N range from 0.1 to 50, Td. Here, E and N are the electric field and the gas density, respectively and 1, Td is 1× 10-17, Vcm2. In this analysis, the differential cross section q(ε, , χ )=q0(ε )(1+a, cos , χ ), where χ is the scattering angle, is used. The effect of forward scattering with a positive value of “a” positively appears as the increase of drift velocity W particularly in the E/N range of highly anisotropic velocity distribution.
