1998 Volume 67 Issue 2 Pages 477-480
Electron collision processes in a plasma with negative ions that were generated by feeding a small amount of SF6 gas into a contact ionization plasma (e.g., Q-machine plasma) were numerically analyzed using a collision-in-cell model. The numerical results are as follows.The density of SF6- is predominant, and is over four times that of SF5-'s. Many of the electrons which underwent vibrational collision, attach to SF6 in subsequent collisions. The electron density can be controlled in a wide range depending on SF6 gas pressures.
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