A Model for Electron Collision in SF ₆ Gas Feeding into a Q-Machine Plasma

抄録

Electron collision processes in a plasma with negative ions that were generated by feeding a small amount of SF₆ gas into a contact ionization plasma (e.g., Q-machine plasma) were numerically analyzed using a collision-in-cell model. The numerical results are as follows.The density of SF₆^- is predominant, and is over four times that of SF₅^-'s. Many of the electrons which underwent vibrational collision, attach to SF₆ in subsequent collisions. The electron density can be controlled in a wide range depending on SF₆ gas pressures.