Abstract
The formation of alloy phases by successive deposition of constituent metal vapours in vacuum was investigated by electron diffraction method for some binary alloy systems. It was concluded that the temperature of the surface layer of primary deposit is raised by the deposition of secondary metal vapour. This temperature rise, which contributes to the formation of alloy phases, is mainly due to the latent heat of condensation of the metal vapour which deposits on the substrate, and consequently metal pairs which have larger latent heat of condensation may form alloys easier than those which have smaller ones. It was also suggested that some structural defects in the substrate layer would contribute to the formation of alloy phases.