Journal of the Physical Society of Japan
Online ISSN : 1347-4073
Print ISSN : 0031-9015
ISSN-L : 0031-9015
A Study of Crystallites in Obliquely Deposited Iron Films by Ellipsometry
Masao KamiyaKazuhiro HaraTakashi HashimotoKunito OkamotoHiroshi Fujiwara
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ジャーナル 認証あり

1983 年 52 巻 10 号 p. 3585-3591

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抄録

Optical constants and their anisotropies of obliquely deposited iron films were measured by ellipsometry, and the shape anisotropy and the anisotropy of packing density of crystallites constituting the film were estimated. Both the anisotropies obtained gave valuable informations on the formation of the columnar structure, which complement the results obtained from the measurement of the magnetic anisotropy and the observation by replica electron microscopy.

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