Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions

抄録

In order to determine electromagnetic (EM) eigenmodes for radio-frequency (RF) plasma productions between a pair of large-area electrodes, normal EM modes propagating in a region between a planar waveguide with one plasma and two dielectric layers are analyzed. Exact solutions are obtained by solving Maxwell’s equations. It is concluded that plasmas higher than a critical value of electron plasma frequency will be produced by an odd surface wave SW_o and less than the critical value, by two transverse-magnetic (TM) odd EM modes, TM₀₁ and TM₁₀.