Evaluation of Three-dimensional Shape and Drive Characteristics of On-chip Gel Actuator

Abstract

Previously, we proposed new light irradiation-based drive method of on-chip gel actuator. In our method, on-chip gel actuators are fixed on a glass substrate with light absorbers. Therefore, deformation of the gel is constricted with fixed part and anisotropically deforms in three dimensions. In this study, we evaluate the three-dimensional shapes and drive characteristics of on-chip gel actuator. Furthermore, we evaluate changes of drive characteristics of the actuators with respect to surface area to volume ratio. From this result, we show the possibilities of control of gel deformation and drive characteristics by changing the design of the proposed gel actuator.