Journal of the Robotics Society of Japan
Online ISSN : 1884-7145
Print ISSN : 0289-1824
ISSN-L : 0289-1824
Examples of Micro-components' Fabrication
Tomotake Furuhata, Toshiki Hirano
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Keywords: Microactuator, Electrostatic Actuator, Electroplating, Poly-Silicon
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1994 Volume 12 Issue 4 Pages 548-553

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[in Japanese]
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© The Robotics Society of Japan
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