Abstract
A thin electrostatic linear actuator using plastic films has been developed. The film actuator consists of two sheets, a stator embedded with three-phase striped electrodes and a slider coated with a slightly conductive material. First, voltages are applied on the stator electrodes to induce electric charges on the slider. Then, pulse voltages are applied to generate propulsive force and have the slider traverse on the stator. The stator sheet has been fabricated by forming 240 [μm] pitched copper lines on a polyimide film and covering them with a polyimide film. As the slider sheet, a 12 [μm] PET film coated with mixture of polyurethane and carbon particles has been used. Total thickness and mass are 120 [μm] and 0.35 [g], respectively. This actuator produced 0.16 [N] propulsive force and 1.6 [mW] output power at 800 [V] driving voltage. The film actuator is expected to be used in variety of applications such as display devices, thin material conveyers, or powerful artificial muscles.
