Journal of the Robotics Society of Japan
Online ISSN : 1884-7145
Print ISSN : 0289-1824
ISSN-L : 0289-1824
Venture Business Laboratory Tohoku University
—Development of Sensors and Micromachines—
Masayoshi Esashi
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Keywords: Sensor, Micromachine, Microactuator, Micromachining, Micro Probe
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2000 Volume 18 Issue 8 Pages 1066-1070

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