Journal of the Robotics Society of Japan
Online ISSN : 1884-7145
Print ISSN : 0289-1824
ISSN-L : 0289-1824
Evaluation of Thin Film Material for Micromechanisms
Osamu TABATA, Susumu SUGIYAMA
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1990 Volume 8 Issue 4 Pages 475-478

[Correction] Journal of the Robotics Society of Japan Vol.8 No.5 (1990) pp.572b-572b
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