Abstract
An analytical approach was proposed for simultaneously determining an inelastic mean free path (IMFP) and a surface excitation parameter (SEP) with absolute units from absolute reflection electron energy loss spectra (REELS) appearing near the elastic peak in absolute Auger electron spectra. The approach was applied to the REELS spectra measured for Ni using 300 to 3000 eV electrons, and the IMFPs and SEPs were determined. The IMFPs determined by the present approach showed good agreement with those calculated using the TPP-2M predictive equation and the theoretical IMFPs calculated from the optical data. The Chen-type predictive equation for calculating the SEPs in Ni was proposed. The present results confirmed that the applicability of the proposed approach for determining the IMFP and SEP with absolute units for medium-energy electrons, which is important for quantification using surface electron spectroscopies.