Abstract
An energy calibration of spectra shifted by a surface charging effect is very important for chemical analysis
in X-ray Photoelectron Spectroscopy (XPS). Adventitious Hydrocarbon Project of Surface Analysis Society of
Japan (SASJ) has performed questionnaires about charge correction for 43 Japanese XPS users in 41 institutes.
The survey shows that the C 1s line of the adventitious carbon is widely used as an energy reference, and the
reference binding energy value of C 1s varies in the range between 284.5 and 285.0 eV. It is also found from the
survey that the value of reference energy is largely relevant to the manufacturer of the XPS instrument