Recent Progress in Cluster Ion Beam

-Toward Nano-Processing and Advanced Material Analysis

Abstract

  “Non-linear Effect” is one of the unique phenomena in cluster ion impacts, where many atoms are collided each other instantaneously. Novel techniques for Nano-Processing and material analysis have been developed in the last decade, and will give us an opportunity to overcome issues in conventional technique with monomer ions. Recent progress in cluster ion beam is reported from the viewpoint of Nano-Processing and advanced material analysis.