Introduction to Electron Optics for the Study of Energy Analyzing Systems (11)

Abstract

  The spatial resolution of an electron optical instrument has its theoretical limit originating from the wave nature of electrons. This effect is called the diffraction aberration, which complements geometrical optics valid in the limit of very short wavelengths. In this chapter we shall give a diffraction treatment of spatial resolution in the presence of spherical and chromatic aberrations, and examine an optical system as a filter of spatial frequencies on the basis of Abbe's imaging theory.