Practical Methods for Detecting Peaks in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Abstract

  Three kinds of peak detecting algorithms for AES and XPS spectrum are proposed. These peak detecting methods are composed of three stages of algorithms: rough estimation of the background; direct calculation of the peak and background relation at the candidate peak; and application of the second derivative curve. This report provides concrete methods of finding peaks in a measured spectrum of surface analysis based on an empirical investigation of how to detect significant signals among faint ones. Algorithms and characteristics of the respective peak detecting methods are discussed.