Abstract
Responses to questionnaires for depth profiling (DP) were summarized. The questionnaires were performed to collect general issues in DP and needs from practical analysis. It has been revealed that destructive sputter DP performed with a help of surface analytical techniques is still a frequently used and powerful technique in practical analysis in industries. The high spatial- and depth-resolutions and high sensitivity are strongly required as a further development in analytical techniques for DP. Meanwhile, a wider analysis area and deeper depth region are also highly needed depending on samples in industries. In addition to the development of techniques from a view point of hardware, data analysis and understanding of depth profiles with high accuracy and traceability are also very important issues in practical applications. International standards dealing with DP are possible solutions for the improvement in the quality of DP of materials and devices required in practical analysis in industries.
