In order to evaluate three peak detection algorithms, the influences of parameter values used were examined using digitized synthetic XPS spectra with different levels of noise. The three peak detection algorithms are the Threshold Curve of the Second Derivative (2nd DER method), the Directly Calculating Peak and Background Relations at a Candidate Peak (PB method), and the Rough Estimation of Spectrum Background (BGD method). The peak detection results clearly showed that particular combination of parameter values produce the best performance for each algorithm. The validity of those parameter values was assessed by comparing the results from the peak detection algorithms with those of visual detection. On the whole, the BGD method was found to be the most practical. The importance of choosing effective parameter values and the advantages and disadvantages of these three peak detection methods were summarized.

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Responses to questionnaires for depth profiling (DP) were summarized. The questionnaires were performed to collect general issues in DP and needs from practical analysis. It has been revealed that destructive sputter DP performed with a help of surface analytical techniques is still a frequently used and powerful technique in practical analysis in industries. The high spatial- and depth-resolutions and high sensitivity are strongly required as a further development in analytical techniques for DP. Meanwhile, a wider analysis area and deeper depth region are also highly needed depending on samples in industries. In addition to the development of techniques from a view point of hardware, data analysis and understanding of depth profiles with high accuracy and traceability are also very important issues in practical applications. International standards dealing with DP are possible solutions for the improvement in the quality of DP of materials and devices required in practical analysis in industries.

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