Abstract
Energy dispersive micro X-ray fluorescence analyzer (EDμXRF） can be measured in the atmosphere with simple
sample preparation and easy operation, so it is used in a wide range of fields such as component analysis of materials, failure analysis, foreign matter analysis, precious metal grade judgment and forensic analysis. In this paper describes the technology used for the main components of EDμXRF and the concept of observation optical system, and introduces an application analysis example using this instruments.
