Abstract
XPS is one of the surface analysis technique like AES (Auger Electron Spectroscopy) and TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry). It is possible to analyze the qualitative, quantitative chemical state of material surface. XPS is the most widely used technique among the surface analysis instrument because is easy operation, fruitful database and easy charge correction method. In this paper the principal of XPS, the configuration of the equipment, the basics of measurement and data analysis and application is described.
