ULV-SEM-EDX analysis of fine precipitates in Cr-Mo steel using windowless silicon-drift detector

Abstract

Elemental analysis technique using a latest windowless silicon-drift detector (SDD) and ultra-low voltage scanning electron microscope (ULV-SEM) have been applied to a Cr-Mo added steel containing several types of carbides and aluminum nitride. Low primary electron energy of around 1 keV reduces interaction volume and then provides remarkably high spatial resolution for x-ray analysis. We obtain elemental mappings of the precipitates with almost the same spatial resolution as ULV-SEM imaging.