Chemical state analysis for Al₂O₃ layer of Y₂O₃/Al₂O₃ multi-layer using laboratory HAXPES

Abstract

We examined the practicability and chemical state analysis of laboratory HAXPES using monochromatic Cr Kα excitation. The acquisition time of nine min and the FWHM of 1.03 eV was obtained by Au 4f measurements. We also clarified the relationship between the oxygen gas flow rate and the chemical state of the Al₂O₃ layer around the Y₂O₃/Al₂O₃ interface for the buried Al₂O₃ layer of Y₂O₃/Al₂O₃ multi-layer film. Our findings demonstrate that laboratory HAXPES with Cr Kα is capable of nondestructive chemical state analysis with practical throughput.