Abstract
By measuring a reference material containing a known amount of the substance to be measured, the output of the analytical instrument can be associated with the value of the reference material. This report will outline characteristics that a reference material and a certified reference material should have, terms for expressing the reliability of measurement results, the uncertainty evaluation method, and the certified reference materials for surface analysis. Regarding the surface analysis techniques measuring the film thickness of a nanoscale-thin film layer and uses the film thickness as a measurand, the influence of material properties other than the film thickness will be mentioned. The challenges in developing standard materials for surface analysis will be described.
https://ror.org/01703db54 
