By measuring a reference material containing a known amount of the substance to be measured, the output of the analytical instrument can be associated with the value of the reference material. This report will outline characteristics that a reference material and a certified reference material should have, terms for expressing the reliability of measurement results, the uncertainty evaluation method, and the certified reference materials for surface analysis. Regarding the surface analysis techniques measuring the film thickness of a nanoscale-thin film layer and uses the film thickness as a measurand, the influence of material properties other than the film thickness will be mentioned. The challenges in developing standard materials for surface analysis will be described.

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Ex-Japan Research Industry and Industrial Technology Associates, JRIA, conducted a series of research on the matrix effect of static secondary-ion mass spectrometry, S-SIMS. In the course of the research, we found that the binary organic mixture which consists of 3,3-Di(9H-carbazol-9-yl)biphenyl, mCBP, and tri-(2-phenylpyridine)iridium, Ir(ppy)3, can be determined mole fraction by S-SIMS, with relative sensitivity factor method, RSF method. Based on the research, Ion beam working group of Japan National Committee for Standardization of Surface Chemical Analysis, JSCA, decided to propose the quantitative analysis method for a binary organic mixture using S-SIMS. International Standard Organization Technical Committee Sub Committee 6, IOS/TC201/SC 6 has resolved to develop the standard of it. In this paper, we review the difficulties of SIMS quantification analysis and matrix effect and outline the JRIA research. We then introduce the draft of the quantification method and diagnostic method of testing whether the molecule can be quantified. We also explain how this draft is to be positioned in the SIMS’s ISO.

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We have developed a "material sequencer" that automatically and continuously evaluates various inorganic materials. This system is designed to collect data for use in machine learning analysis. Therefore, the output measurement data and metadata (data explaining the data) have been formatted. Each measuring instrument is housed in a space of about 40 cm square, and is modularized in terms of sample access method and control input/output. The sample is transported by a transport cart moving on the rail, and the measurement is accessed from the top surface of the sample. The sample is objected for 0.5-inch size inorganic materials. Currently, image measurement, reflection measurement, resistance measurement can be performed in this system, and the measuring instruments can be further expanded.

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