Investigation of Electron Beam Damage on All-solid-state Battery Materials for AES Chemical Mapping

Abstract

All-solid-state batteries (ASSBs) have been attracting attention as the next generation batteries. The reduction of the internal resistance generated at the interface between solid electrolyte and cathode has become the key issue for practical use. In this study, authors tried to observe the cross-section of solid electrolyte/cathode interface using Scanning Auger Microprobe (SAM) incorporated into the multi-technique XPS system. it is challenging because the solid electrolyte materials are generally vulnerable to the electron beam. Therefore, we first evaluated the electron beam damage on a LiPON surface, and then determined the optimal conditions for AES mapping. In addition, by using this optimal conditions, it was shown that Lithium chemical state mapping of LiPON/LiCoO₂ cross sections can be evaluated.