Abstract
We applied Grazing Exit Electron Probe Microanalysis (GE-EPMA) to analyze an inclusion on an uneven surface of a metallic material and investigated its efficiency. It is necessary in GE-EPMA that an analytical object exists on a flat surface due to its principle. A range of its application has ever been narrow due to this restriction and applications have ever been few. We have developed a novel method of an adjustment of an exit angle of characteristic X-rays to do an analysis of GE-EPMA by using a usual EDS-SEM. Then we tried to apply it to qualitative analyses of small (approximately 0.3 μm) inclusions on a uneven surface of an etched stainless steel. As the result of the analysis, it was possible to identify the component of the inclusion. The inclusion was an oxide that consisted of Mg, Al, Ca, Ti, Cr and Mn.
