Abstract
Automatic background estimation for XPS, AES and EDX spectra is attempted in order to make rapid qualitative and/or quantitative analyses. The start and end points of the background at both sides of each spectrum peak are obtained on a given algorithm. To link these start and end points, the background curve can be chosen from two methods: linear or Shirley. The selection of the methods gives not a negligible difference on the result of the quantitative analysis for a spectrum with high background.
