抄録
An eddy current sensors have various uses, for example metal detection and determination, nondestructive inspection, and position detection. However, there are few studies which show the influence of a conductor on the impedance of a detector coil using a theoretical formula. This paper shows the simplified calculation method on impedance of a planar coil that can be found from an equivalent circuit by considering that a conductor plate is one turn of coil which form changes according to displacement. The impedance corresponding to the overlap length of a conductor plate was calculated about the planar rectangular coil and the planar triangular coil. The calculated value was compared with the measured value and the calculated value of finite element method. The calculated value of impedance of rectangular coil and triangular coil agreed with the measured value within an error of ± 5.98%. Mutual inductance between the planar coil and conductor plate was calculated from the area ratio of planar coil and overlap.
